Sydney Thunder 129 for 4 (Litchfield 46) beat Hobart Hurricanes 126 for 6 (Villani 49*) by six wickets
With Thunder chasing 127 for victory in the knockout final, they appeared to be in trouble with 26 runs required from the final three overs.
The 21-year-old was eventually bowled trying to scoop Carey and finish the game off, but by the time she walked from the field on 46 the game was effectively over.
Litchfield controlled the chase calmly, twice breaking the tension by driving Hurricanes’ bowlers to the rope when the pressure appeared to be building. She hit five fours in her 36-ball knock with Hurricanes left to rue a crucial missed stumping chance when Litchfield was on 23 and Thunder still needed 42 to win.
The victory means Thunder will play Brisbane Heat in Friday night’s Challenger, with the winner of that to face the Melbourne Renegades in Sunday’s final at the MCG.
Athapaththu’s 2 for 24 did the bulk of the damage with the ball, bowling Carey for 1 and then having Heather Graham caught cutting to cover cutting on 10.
Litchfield also took two neat catches, while Taneale Peschel got the key wicket of Lizelle Lee for 23.
And while Molly Strano’s 1 for 8 from four overs and Amy Smith’s 1 for 17 from three threatened to strangle Thunder, Litchfield was in the end too good after being offered a second life.